Silicon wafer thickness
Files | Size | Format | Created | Updated | License | Source |
---|---|---|---|---|---|---|
1 | csv | Silicon wafer thickness |
Thickness of a single wafer, measured at 9 locations for 184 consecutive batches. A single wafer is removed from a tray of wafers (always at the same position for each batch of wafers) after the chemi...
Read more
Data Files
File | Description | Size | Last modified | Download |
---|---|---|---|---|
Silicon wafer thickness | Silicon wafer thickness |
Data Previews
Silicon wafer thickness
Description
Thickness of a single wafer, measured at 9 locations for 184 consecutive batches. A single wafer is removed from a tray of wafers (always at the same position for each batch of wafers) after the chemical vapour decomposition
process is complete.
Dataset
The data is from an industrial data (origin unknown). The data has been approximately centered and scaled to disguise the original variables - for confidentiality. There are 9 thickness locations on a single wafer.
Preparation
Python version: 3.6
License
Please follow this for License information