Silicon wafer thickness
| Files | Size | Format | Created | Updated | License | Source |
|---|---|---|---|---|---|---|
| 1 | csv | Silicon wafer thickness |
Thickness of a single wafer, measured at 9 locations for 184 consecutive batches. A single wafer is removed from a tray of wafers (always at the same position for each batch of wafers) after the chemi...
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Data Files
| File | Description | Size | Last modified | Download |
|---|---|---|---|---|
Silicon wafer thickness | Silicon wafer thickness |
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Silicon wafer thickness
Description
Thickness of a single wafer, measured at 9 locations for 184 consecutive batches. A single wafer is removed from a tray of wafers (always at the same position for each batch of wafers) after the chemical vapour decomposition process is complete.
Dataset
The data is from an industrial data (origin unknown). The data has been approximately centered and scaled to disguise the original variables - for confidentiality. There are 9 thickness locations on a single wafer.
Preparation
Python version: 3.6
License
Please follow this for License information
